Manufacturer: FEI (America)

Equipment model: Quanta FEG 450

Location: Room 110 of Science and Technology Building

Person-in-charge: Li Xiao

Tel.: 62332598-6110

Main function

The device combines the advantages of field emission electron microscope’s high resolution and ESEM’s (environment scanning electron microscope) support for different specimens. It is suitable for high-resolution observation and analysis of surface appearance, composition, orientation, etc. of various specimens, including conductive specimens, non-conductive specimens, water-/oil-containing specimens, outgassed specimens, heated specimens and cooled specimens. In addition to static specimen observation, the device also supports dynamic observation and analysis, including specimen dehydration, humidification, heating and solidification. The device is widely used in research and development in the field of metal materials, inorganic non-metallic materials, metallurgy, automobiles, biology, medicine, criminal investigation technology, etc.

Main technical parameters

Vacuum mode: high vacuum mode, low vacuum mode and ambient vacuum mode

Resolution: 1.0 nm@30 kV (high vacuum mode)

1.4 nm@30 kV (low vacuum mode)

1.4 nm@30 kV (ambient vacuum mode)

Magnification: 10 × ~ 1,000,000 ×

Acceleration voltage: 0.2 kV ~ 30 kV

Probe current: up to 200 nA

Specimen stage: stroke: X = Y = 100 mm; Z = 60 mm

Rotation: 360° continuous

Tilt: -5° to +70°

Configuration

1. Detector:

ETD: secondary electron probe (high vacuum mode)

LFD: secondary electron probe (low vacuum mode)

GSED: secondary electron probe (ambient vacuum mode)

BSED: backscattered electron probe

2. X-ray energy dispersive spectrometer (EDS)

Model: TEAM EDS (EDAX)

Energy resolution: 125 eV@MnKα

Detection element range: Be4-U92

3. Electron back scattering diffraction (EBSD) analysis system

Model: Hikari XP (EDAX)

Orientation accuracy: better than 0.1°

Acquisition speed: 650 Hz (point/second)

4. Heating stage

Temperature range: 23°C-1,500°C

Heating rate: ≤ 50°C/min.

Temperature control accuracy: ~ 25°C

Cooling: circulating water cooling

Gas type: water vapor, air, nitrogen and other gases

Laboratory appointment:

http://202.204.49.249/Equipment/Show?Id=1a330500-9069-41a9-9ea6-8747704af6ba